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          1. 板式PECVD上下料機

            產品特點

            最高產能可達到6000pcs/h 

            可根據客戶需求進行定制 

            設備結構簡單穩定

            技術參數

            技術參數相關參數
            產速 4000 /6000 pcs/h(可訂制)
            碳框尺寸 

            10*10(5*5,5*6,8*10,9*10 可選)

            硅片尺寸 

            166mm-210mm

            碎片率  ≤0.02%
            開機率≥98%
            功率15kW
            耗氣量500L/min
            具體參數如有變動,本公司不另行通知!
            返回
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